Microelectromechanical resonators for radio frequency communication applications
نویسندگان
چکیده
منابع مشابه
Microelectromechanical Resonators for Radio Frequency Communication Applications
Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size, large frequency-quality factor product, low power consumption, low cost batch fabrication, and integrability with CMOS IC technology. Radio frequency communi...
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OF DOCTORAL DISSERTATION HELSINKI UNIVERSITY OF TECHNOLOGY P.O. BOX 1000, FI-02015 TKK http://www.tkk.fi Author Mika Petteri Koskenvuori Name of the dissertation Microelectromechanical resonators for frequency reference and frequency conversion applications Manuscript submitted 07.12.2007 Manuscript revised 03.03.2008 Date of the defence 04.04.2008 Monograph Article dissertation (summary + orig...
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ژورنال
عنوان ژورنال: Microsystem Technologies
سال: 2011
ISSN: 0946-7076,1432-1858
DOI: 10.1007/s00542-011-1332-9